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Setter, Nava

Electroceramic-Based Mems fabrication-technology and applications by Nava Setter - Berlin Springer Verlag 2005 - xii, 414p.

Contents :
1. MEMS - Based Thin Film an

ISBN: 0387233105

Subjects--Topical Terms:
Microelectromechanical systems

Dewey Class. No.: 621.381 SET

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