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Paik, Ungyu

Nanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices by Ungyu Paik - New York CRC Press 2009 - xiii, 191p.

Contents:
1. Overview of CMP Technology

ISBN: 1420059114

Subjects--Topical Terms:
Nanoparticles
Nanoelectronics
Chemical mechanical planarization.

Dewey Class. No.: 621.38152 PAI

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