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Sedky, Sherif

Post-Processing Techniques for Integrated MEMS by Sherif Sedky - Bostan Artech House 2006 - xiv, 207p.

Contents:
1. MEMS monolithic integratio

ISBN: 1580539017

Subjects--Topical Terms:
Microelectromechanical systems

Dewey Class. No.: 621.381 SED

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