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Campbell, Stephen A

Science and Engineering of Microelectronic Fabrication by Stephen A. Campbell - 2nd ed. - New York Oxford University Press 2004 - xiv,603

Contents :
1. An Introduction to Microe

ISBN: 0195136055

Subjects--Topical Terms:
Semiconductors--Design and construction
science engineering
Microelectronics

Dewey Class. No.: 621.38152 CAM

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