American Institute of Physics
Journal of micromechanics and microengineering : structures, devices, and systems. - Bristol, England IOP Publishing Ltd 1994 - Volume 4, Issue 2, June 1994
0960-1317
Solid state physics - Periodicals
Micromechanics - Periodicals
EJ0004
Journal of micromechanics and microengineering : structures, devices, and systems. - Bristol, England IOP Publishing Ltd 1994 - Volume 4, Issue 2, June 1994
0960-1317
Solid state physics - Periodicals
Micromechanics - Periodicals
EJ0004