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Irene, Eugene A

Surfaces, Interfaces, and Thin Films for Microelectronics Eugene A. Irene. - Hoboken, N.J. Wiley 2008 - xiii, 515p.

ISBN: 9780470174470

Subjects--Topical Terms:
Microelectronics - Materials
Thin films
Interfaces (Physical sciences)
Surface chemistry

Dewey Class. No.: 621.381 IRE

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