Microlithography: science and technology (Record no. 60238)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00528nam a2200181Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 180620b1998 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0824799534 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381531 SHE |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Sheats, James R. |
| 245 ## - TITLE STATEMENT | |
| Title | Microlithography: science and technology |
| Statement of responsibility, etc. | James R. Sheats |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New York |
| Name of publisher, distributor, etc. | Marcel Dekker Inc. |
| Date of publication, distribution, etc. | 1998 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xii, 780p. |
| 365 ## - TRADE PRICE | |
| Price type code | .00 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microlithography |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Metal oxide semiconductor |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Smith, Brouce W. |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) | |
| a | 2dbb4a057f000001004cfe8f5b8b0081 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Cost, normal purchase price | Serial Enumeration / chronology | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| REFERENCE SECTION | LRC_JUIT | LRC_JUIT | Electronics & Communication Engineering | 05/03/2010 | Krishna Book Distributors | 6988.32 | Copy 1 | REF 621.381531 SHE | 018670 | 21/05/2019 | 21/05/2019 | REFERENCE BOOK |