Handbook of VLSI Microlithography: Principles, Tools, Technology and Applications by John N. Helbert
Material type:
TextPublication details: Mumbai Jaico Publishing House 2008Description: xix, 1001pISBN: 8179928993Subject(s): VLSI--Microlithography | VLSIDDC classification: 621.395 HEL
Contents:
Table of Contents:
1 Issues and trends
| Item type | Current library | Collection | Call number | Vol info | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|---|
REFERENCE BOOK
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LRC_JUIT Electronics & Communication Engineering | RESERVE SECTION | RES 621.395 HEL (Browse shelf (Opens below)) | Copy 1 | Not for loan | 020397 | ||
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REFERENCE BOOK
|
LRC_JUIT Electronics & Communication Engineering | RESERVE SECTION | RES 621.395 HEL (Browse shelf (Opens below)) | Copy 2 | Not for loan | 020398 |
Total holds: 0
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| RES 621.39103 DRI Encyclopedia of Optical Engineering ; Vol. 3 of 3: Pho-Z | RES 621.3916 RAN Smart Card Handbook | RES 621.395 HEL Handbook of VLSI Microlithography: Principles, Tools, Technology and Applications | RES 621.395 HEL Handbook of VLSI Microlithography: Principles, Tools, Technology and Applications | RES 621.395 MCG Semiconductor Materials and Process Technology Handbook : for VLSI and ULSI | RES 621.395 MCG Semiconductor Materials and Process Technology Handbook : for VLSI and ULSI | RES 621.395 MCG Semiconductor Materials and Process Technology Handbook : for VLSI and ULSI |
Table of Contents:
1 Issues and trends
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