Materials and Process Integration for MEMS Edited by Francis E.H. Tay
Material type: TextPublication details: Boston Kluwer Academic Publishers 2002Description: xix, 299pISBN: 1402071752Subject(s): Microelectromechanical systemsDDC classification: 621.381 TAY
Contents:
Table of Contents:
1 Integration of Pie
Item type | Current library | Collection | Call number | Vol info | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|---|---|
REFERENCE BOOK | LRC_JUIT Electronics & Communication Engineering | REFERENCE SECTION | REF 621.381 TAY (Browse shelf (Opens below)) | Copy 1 | Not for loan | 020266 |
Total holds: 0
Table of Contents:
1 Integration of Pie
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