Journal of micromechanics and microengineering : structures, devices, and systems.

By: American Institute of PhysicsMaterial type: TextTextPublication details: Bristol, England IOP Publishing Ltd 1993Description: Volume 3, Issue 1, March 1993ISSN: 0960-1317Subject(s): Solid state physics - Periodicals | Micromechanics - PeriodicalsDDC classification: EJ0004 Online resources: Click here to access online
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