TY  - BOOK
AU  - Setter, Nava
TI  - Electroceramic-Based Mems fabrication-technology and applications
SN  - 0387233105
U1  - 621.381 SET 
PY  - 2005///
CY  - Berlin
PB  - Springer Verlag
KW  - Microelectromechanical systems
N1  - Contents :
1. MEMS - Based Thin Film an
ER  -