May, Gary S. <br/><br/>
Fundamentals of Semiconductor Fabrication 
Gary S. May 
 - Singapore  John Wiley & Sons  2004 
 - xiii,305p. 
<br/><br/><label>ISBN: </label>981253072X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor fabrication
<br/><br/><label>Dewey Class. No.: </label>537.622 MAY