TY  - BOOK
AU  - May, Gary S.
AU  - Sze, S.M.
TI  - Fundamentals of Semiconductor Fabrication
SN  - 981253072X
U1  - 537.622 MAY 
PY  - 2004///
CY  - Singapore
PB  - John Wiley & Sons
KW  - Semiconductor fabrication
ER  -