May, Gary S. <br/><br/>
Fundamentals of Semiconductor Manufacturing and Process Control 
by Gary S. May 
 - New Jersy  Wiley-Interscience  2006 
 - xix, 463p. 
<br/><br/>Table of Contents<br/>1 Introduction to sem 
<br/><br/><label>ISBN: </label>0471784060 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors -- design and constructions<br/>Process control -- Statistical methods
<br/><br/><label>Dewey Class. No.: </label>621.38152 MAY