TY  - BOOK
AU  - May, Gary S.
AU  - Spanos, Costas J.
TI  - Fundamentals of Semiconductor Manufacturing and Process Control
SN  - 0471784060
U1  - 621.38152 MAY 
PY  - 2006///
CY  - New Jersy
PB  - Wiley-Interscience
KW  - Semiconductors -- design and constructions
KW  - Process control -- Statistical methods
N1  - Table of Contents
1 Introduction to sem
ER  -