TY  - BOOK
AU  - Hoffman, Dorothy M.
AU  - Thomas, John H.
AU  - Singh, Bawa
TI  - Handbook of Vacuum science and technology
SN  - 0123520657
U1  - 621.55 HOF 
PY  - 1997///
CY  - New York
PB  - Academic Press
KW  - Vacuum technology -- handbook, manuals
ER  -