Helbert, John N. <br/><br/>
Handbook of VLSI Microlithography: Principles, Tools, Technology and Applications 
by John N. Helbert 
 - Mumbai  Jaico Publishing House  2008 
 - xix, 1001p. 
<br/><br/>Table of Contents:<br/>1 Issues and trends  
<br/><br/><label>ISBN: </label>8179928993 
<br/><br/><label>Subjects--Topical Terms: </label><br/>VLSI--Microlithography<br/>VLSI
<br/><br/><label>Dewey Class. No.: </label>621.395 HEL