TY  - BOOK
AU  - Helbert, John N.
TI  - Handbook of VLSI Microlithography: Principles, Tools, Technology and Applications
SN  - 8179928993
U1  - 621.395 HEL 
PY  - 2008///
CY  - Mumbai
PB  - Jaico Publishing House
KW  - VLSI--Microlithography
KW  - VLSI
N1  - Table of Contents:
1 Issues and trends
ER  -