TY - BOOK AU - Huff, H. R. AU - Gilmer, D. C. TI - High Dielectric Constant Materials : VLSI MOSFET applications SN - 3540210814 U1 - 621.3815 HUF PY - 2005/// CY - Berlin PB - Springer Verlag KW - Microelectronics VLSIMOSFET KW - Integrated circuits -- Materials N1 - Contents : 1 The economic implications ER -