Gad-el-Hak, Mohamed MEMS: introduction and fundamentals Edited by Mohamed Gad-el-Hak - 2nd ed. - New York CRC Press 2006 - xii, (Aprox Pages) 1. Introducation Mohamed Gad-ed-Hak2. ISBN: 0849391377 Subjects--Topical Terms: NanotechnologyMicroelectronics Dewey Class. No.: 621.381 GAD