TY  - BOOK
AU  - Gad-el-Hak,  Mohamed
TI  - MEMS: introduction and fundamentals
SN  - 0849391377
U1  - 621.381 GAD 
PY  - 2006///
CY  - New York
PB  - CRC Press
KW  - Nanotechnology
KW  - Microelectronics
N1  - 1. Introducation Mohamed Gad-ed-Hak
2.
ER  -