Hsu, Tai-Ran <br/><br/>
MEMS Packaging 
by Tai-Ran Hsu 
 - United Kingdom  Institution of Electrical Engineers (IEE)  2004 
 - xxix, 275p. 
<br/><br/>Table of Contents;<br/>1 Fundamentals of ME 
<br/><br/><label>ISBN: </label>0863413358 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronic packaging<br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381 HSU