TY  - BOOK
AU  - Gilleo, Ken
TI  - MEMS/MOEMS Packaging : concepts, Designs, Materials, and Processes
SN  - 0071455566
U1  - 621.381046 GIL 
PY  - 2005///
CY  - Auckland
PB  - McGraw-Hill
KW  - Nanotechnology
KW  - Microelectronic packaging
KW  - Microelectromechanical systems
N1  - Table of Contents
Ch. 1 Engineering fun
ER  -