Jackson, Mark J. <br/><br/>
Micro and Nanomanufacturing 
by Mark J. Jackson 
 - New York  Springer  2007 
 - x, 699p. 
<br/><br/><p>Table of contents 1. Principles of M 
<br/><br/><label>ISBN: </label>9780387258744 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnology<br/>Microfabrication
<br/><br/><label>Dewey Class. No.: </label>620.5 JAC