TY  - BOOK
AU  - Jackson, Mark J.
TI  - Micro and Nanomanufacturing
SN  - 9780387258744
U1  - 620.5 JAC 
PY  - 2007///
CY  - New York
PB  - Springer
KW  - Nanotechnology
KW  - Microfabrication
N1  - <p>Table of contents 1. Principles of M
ER  -