Paik, Ungyu <br/><br/>
Nanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices 
by Ungyu Paik 
 - New York  CRC Press  2009 
 - xiii, 191p. 
<br/><br/>Contents:<br/>1. Overview of CMP Technology 
<br/><br/><label>ISBN: </label>1420059114 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanoparticles<br/>Nanoelectronics<br/>Chemical mechanical planarization.
<br/><br/><label>Dewey Class. No.: </label>621.38152 PAI