TY  - BOOK
AU  - Taniguchi, Norio
TI  - Nanotechnology: Integrated Processing System for Ultra-Precision and Ultra-Fine Products
SN  - 0195693272
U1  - 620.5 TAN 
PY  - 2008///
CY  - New Delhi
PB  - Oxford University Press
KW  - Nanotechnology
N1  - Table of Contents:
Part 1: Fundamentals
ER  -