TY  - BOOK
AU  - Ananthasuresh, G. K.
TI  - Optimal Synthesis methods for MEMS
SN  - 1402076207
U1  - 621.381 ANA 
PY  - 2003///
CY  - London
PB  - Kluwer Academic Publishers
KW  - Microelectromechanical systems -- Computer simulation
N1  - Table of Contents;
Ch. 1 Introduction 1
ER  -