Sedky, Sherif <br/><br/>
Post-Processing Techniques for Integrated MEMS 
by Sherif Sedky 
 - Bostan  Artech House  2006 
 - xiv, 207p. 
<br/><br/>Contents:<br/>1. MEMS monolithic integratio 
<br/><br/><label>ISBN: </label>1580539017 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381 SED