TY  - BOOK
AU  - Sedky, Sherif
TI  - Post-Processing Techniques for Integrated MEMS
SN  - 1580539017
U1  - 621.381 SED 
PY  - 2006///
CY  - Bostan
PB  - Artech House
KW  - Microelectromechanical systems
N1  - Contents:
1. MEMS monolithic integratio
ER  -