Campbell, Stephen A <br/><br/>
Science and Engineering of Microelectronic Fabrication 
by Stephen A. Campbell 
 - 2nd ed. 
 - New York  Oxford University Press  2004 
 - xiv,603 
<br/><br/>Contents :<br/>1. An Introduction to Microe 
<br/><br/><label>ISBN: </label>0195136055 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction<br/>science engineering<br/>Microelectronics
<br/><br/><label>Dewey Class. No.: </label>621.38152 CAM