TY  - BOOK
AU  - Campbell, Stephen A
TI  - Science and Engineering of Microelectronic Fabrication
SN  - 0195136055
U1  - 621.38152 CAM 
PY  - 2004///
CY  - New York
PB  - Oxford University Press
KW  - Semiconductors--Design and construction
KW  - science engineering
KW  - Microelectronics
N1  - Contents :
1. An Introduction to Microe
ER  -