Campbell, Stephen A <br/><br/>
Science and Engineering of Microelectronic Fabrication 
by Stephen A Campbell 
 - New York  Oxford University Press  2005 
 - xiv, 603p. 
<br/><br/>Table of Contents<br/>Pt. I Overview and Ma 
<br/><br/><label>ISBN: </label>0195136055 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor -- Design and Construction
<br/><br/><label>Dewey Class. No.: </label>621.38152 CAM