TY  - BOOK
AU  - Campbell, Stephen A
TI  - Science and Engineering of Microelectronic Fabrication
SN  - 0195136055
U1  - 621.38152 CAM 
PY  - 2005///
CY  - New York
PB  - Oxford University Press
KW  - Semiconductor -- Design and Construction
N1  - Table of Contents
Pt. I Overview and Ma
ER  -