Ghandhi, Sorab K. VLSI Fabrication Principles: silicon and gallium arsenide by Sorab K. Ghandhi - 2nd ed. - New Delhi Wiley India 2008 - xxiv, 834p.
Table of Contents:
1.Materia ISBN: 9788126517909 Subjects--Topical Terms: Integrated Circuits Dewey Class. No.: 621.395 GHA