Ghandhi, Sorab K. <br/><br/>
VLSI Fabrication Principles: silicon and gallium arsenide 
Sorab K. Ghandhi 
 - 2nd 
 - New York  John Wiley & Sons  1994 
 - xxiv,833p. 
<br/><br/><label>ISBN: </label>9814126942 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated Circuits
<br/><br/><label>Dewey Class. No.: </label>621.395 GHA