TY  - BOOK
AU  - Ghandhi, Sorab K.
TI  - VLSI Fabrication Principles: silicon and gallium arsenide
SN  - 9814126942
U1  - 621.395 GHA 
PY  - 1994///
CY  - New York
PB  - John Wiley & Sons
KW  - Integrated Circuits
ER  -