TY  - BOOK
AU  - American Institute of Physics
TI  - Journal of micromechanics and microengineering : structures, devices, and systems
SN  - 0960-1317
U1  - EJ0004 
PY  - 1998///
CY  - Bristol, England
PB  - IOP Publishing Ltd
KW  - Solid state physics - Periodicals
KW  - Micromechanics - Periodicals
UR  - http://iopscience.iop.org/0960-1317/8/4
ER  -