American Institute of Physics <br/><br/>
Journal of micromechanics and microengineering : structures, devices, and systems. 

 - Bristol, England  IOP Publishing Ltd  2007 
 - Volume 17, Issue 3, September 2007 
<br/><br/><label>ISSN: </label>0960-1317 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Solid state physics - Periodicals<br/>Micromechanics - Periodicals
<br/><br/><label>Dewey Class. No.: </label>EJ0004