TY  - BOOK
AU  - Lang, Jeffrey H.
TI  - Multi-Wafer Rotating Mems Machines: turbines, generators, and engines
SN  - 9780387777467
U1  - 621.381 LAN 
PY  - 2009///
CY  - New York
PB  - Springer
KW  - Combustion
KW  - Materials Structures
N1  - <p>Contents:</p>

<p>1. Introduction to
ER  -