TY  - BOOK
AU  - Misawa,  Hiroaki
AU  - Juodkazis, Saulius
TI  - 3D Laser Microfabrication: principles and applications
SN  - 352731055X
U1  - 621.366 MIS 
PY  - 2006///
CY  - Germany
PB  - Wiley
KW  - Microfabrication
KW  - Lasers -- Industrial applications
ER  -