Sheats, James R. <br/><br/>
Microlithography: science and technology 
James R. Sheats 
 - New York  Marcel Dekker Inc.   1998 
 - xii, 780p. 
<br/><br/><label>ISBN: </label>0824799534 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography<br/>Metal oxide semiconductor
<br/><br/><label>Dewey Class. No.: </label>621.381531 SHE