TY  - BOOK
AU  - Sheats, James R.
AU  - Smith, Brouce W.
TI  - Microlithography: science and technology
SN  - 0824799534
U1  - 621.381531 SHE 
PY  - 1998///
CY  - New York
PB  - Marcel Dekker Inc. 
KW  - Microlithography
KW  - Metal oxide semiconductor
ER  -