TY - BOOK AU - Varadan, Vijay K. AU - Gopalakrishnan, S. AU - Vinoy, K. J. TI - Smart Material System and MEMS : design and Development Methodologies SN - 0470093617 U1 - 621.381 VAR PY - 2006/// CY - England PB - John Wiley & Sons KW - Smart Materials KW - MEMS ER -