Irene, Eugene A <br/><br/>
Surfaces, Interfaces, and Thin Films for Microelectronics 
Eugene A. Irene. 
 - Hoboken, N.J.  Wiley  2008 
 - xiii, 515p. 
<br/><br/><label>ISBN: </label>9780470174470 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics - Materials<br/>Thin films<br/>Interfaces (Physical sciences)<br/>Surface chemistry
<br/><br/><label>Dewey Class. No.: </label>621.381 IRE