TY  - BOOK
AU  - Santos, Héctor J. de los
TI  - Introduction to Microelectromechanical Microwave Systems
SN  - 9781580538718
U1  - 621.3813 SAN 
PY  - 2004///
CY  - Boston
PB  - Artech House
KW  - Microelectromechanical systems
KW  - Microwave devices
ER  -