TY  - BOOK
AU  - El-Kareh, Badih
TI  - Silicon Devices and Process Integration: deep submicron and nano-scale technologies
SN  - 9780387367989
U1  - 621.3815 ELK 
PY  - 2009///
CY  - New York
PB  - Springer Verlag, Netherlands
KW  - Linear integrated circuits -- Design
KW  - Metal oxide semiconductors, Complementary
ER  -