TY  - BOOK
AU  - Nalwa, Hari Singh
TI  - Handbook of Thin Film Materials: deposition and processing of thin films; vol. 1
SN  - 9780125129091
U1  - 621.38152 NAL 
PY  - 2002///
CY  - San Diego
PB  - Academic Press
KW  - Thin films - Handbooks, manuals, etc
ER  -