TY  - BOOK
AU  - Bhushan, Bharat
AU  - Kawata, Satoshi
AU  - Fuchs, Harald
TI  - Applied Scanning Probe Methods V: scanning probe microscopy techniques
SN  - 3540373152
U1  - 621.1299 BHU 
PY  - 2007///
CY  - Berlin
PB  - Springer Verlag
KW  - Material microscopy
N1  - Contents:
1. Integrated Cantilevers and
ER  -