OPAC_KOHA catalog › Results of search for 'au:"Campbell, Stephen A"'

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	1.	Science and Engineering of Microelectronic Fabrication by Stephen A. Campbell by Campbell, Stephen A. Edition: 2nd ed.Material type: Text Publication details: New York Oxford University Press 2004Availability: Items available for loan: Call number: 621.38152 CAM (3). Place hold Request article Add to cart (remove)
	2.	Science and Engineering of Microelectronic Fabrication by Stephen A Campbell by Campbell, Stephen A. Material type: Text Publication details: New York Oxford University Press 2005Availability: Items available for loan: Call number: 621.38152 CAM (5). Place hold Request article Add to cart (remove)